Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098414 | Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method | Takashi Mitsuya, Ryuya Koizumi, Masashi Shimoyama, Kunio Oishi | 2021-08-24 |
| 11024520 | Substrate processing apparatus | Keiichi Kurashina | 2021-06-01 |
| 11015261 | Substrate holder and plating apparatus | Yoshitaka Mukaiyama, Junitsu Yamakawa, Takuya Tsushima, Tomonori Hirao, Sho Tamura +1 more | 2021-05-25 |