Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11015261 | Substrate holder and plating apparatus | Yoshitaka Mukaiyama, Toshio Yokoyama, Junitsu Yamakawa, Tomonori Hirao, Sho Tamura +1 more | 2021-05-25 |
| 10991605 | Substrate processing device, method for controlling substrate processing device, and storage medium storing a program | Junitsu Yamakawa | 2021-04-27 |