Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11168396 | Method of manufacturing semiconductor device and recording medium | Masahisa Okuno, Katsuhiko Yamamoto, Takuya JODA, Sadayoshi Horii | 2021-11-09 |
| 11101111 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toshiya Shimada, Tomihiro Amano | 2021-08-24 |
| 10985017 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuhiko Yamamoto, Takuya JODA, Sadayoshi Horii | 2021-04-20 |