Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11168396 | Method of manufacturing semiconductor device and recording medium | Toru Kakuda, Masahisa Okuno, Katsuhiko Yamamoto, Sadayoshi Horii | 2021-11-09 |
| 11035037 | Substrate processing apparatus and metal member | Tetsuaki INADA, Daisuke Hara | 2021-06-15 |
| 10985017 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuhiko Yamamoto, Toru Kakuda, Sadayoshi Horii | 2021-04-20 |