Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181573 | Inspection apparatus and cleaning method of inspection apparatus | Kentaro Konishi | 2021-11-23 |
| 11131708 | Aligning mechanism and aligning method | — | 2021-09-28 |
| 11133214 | Substrate transportation method | — | 2021-09-28 |