Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047042 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2021-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047042 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2021-06-29 |