Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056325 | Methods and apparatus for substrate edge uniformity | Alexander Jansen, Yana Cheng, Randal Dean Schmieding, Yong Cao, Xianmin Tang +1 more | 2021-07-06 |
| 10886113 | Process kit and method for processing a substrate | Weimin Zeng, Yong Cao | 2021-01-05 |