Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069535 | Atomic layer etch of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Wenbing Yang +2 more | 2021-07-20 |
TS
Teh-Tien Su
Overall (2021): #237,319 of 548,734Top 45%
1
Patents 2021