Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145483 | Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method | Takahito Nakayama | 2021-10-12 |
| 10998164 | Charged particle beam writing apparatus and charged particle beam writing method | Hirofumi Morita, Munehiro Ogasawara | 2021-05-04 |