Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177147 | Substrate treatment apparatus, controller of substrate treatment apparatus, method for controlling substrate treatment apparatus, and memory medium storing program | — | 2021-11-16 |
| 11098414 | Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method | Ryuya Koizumi, Toshio Yokoyama, Masashi Shimoyama, Kunio Oishi | 2021-08-24 |
| 11099546 | Scheduler, substrate processing apparatus, and substrate conveyance method | Koji Nonobe, Ryuya Koizumi, Kunio Oishi | 2021-08-24 |