Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099546 | Scheduler, substrate processing apparatus, and substrate conveyance method | Takashi Mitsuya, Ryuya Koizumi, Kunio Oishi | 2021-08-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099546 | Scheduler, substrate processing apparatus, and substrate conveyance method | Takashi Mitsuya, Ryuya Koizumi, Kunio Oishi | 2021-08-24 |