Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075102 | Positioning device | Georg Fink, Henrik Petry | 2021-07-27 |
| 10937681 | Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner | Yasuaki Amano, Lennert Schwart | 2021-03-02 |