Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937681 | Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner | Sven Hansen, Lennert Schwart | 2021-03-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937681 | Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner | Sven Hansen, Lennert Schwart | 2021-03-02 |