Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035040 | Showerhead and substrate processing apparatus | Edward Sung, Jin-young Bang, Hyuk-Jin Kim | 2021-06-15 |
| 11019733 | Mounting structure for module in electronic device | Hyung Dal Kim, Oh Hyuck Kwon, Han-Vit Kang, Jun Young Kim, Moon Kyeong Kim +5 more | 2021-05-25 |
| 10950419 | Shrouds and substrate treating systems including the same | Edward Sung, Hyuk-Jin Kim, Daehyun Jang | 2021-03-16 |