Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158549 | Method, control system and plant for processing a semiconductor wafer, and semiconductor wafer | Christof Weber, Axel Beyer | 2021-10-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158549 | Method, control system and plant for processing a semiconductor wafer, and semiconductor wafer | Christof Weber, Axel Beyer | 2021-10-26 |