Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158549 | Method, control system and plant for processing a semiconductor wafer, and semiconductor wafer | Stefan WELSCH, Axel Beyer | 2021-10-26 |
| 10961638 | Method for epitaxially coating semiconductor wafers, and semiconductor wafer | Christian Hager, Katharina May | 2021-03-30 |