Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920087 | Hydrogenated isotopically enriched boront trifluoride dopant source gas composition | Sharad N. Yedave, Oleg Bly, Joseph D. Sweeney, Ying Tang | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920087 | Hydrogenated isotopically enriched boront trifluoride dopant source gas composition | Sharad N. Yedave, Oleg Bly, Joseph D. Sweeney, Ying Tang | 2021-02-16 |