Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189480 | Element chip manufacturing method | Atsushi Harikai, Akihiro Itou | 2021-11-30 |
| 11145548 | Manufacturing process of element chip using laser grooving and plasma-etching | Hidefumi SAEKI, Atsushi Harikai | 2021-10-12 |
| 11145494 | Plasma processing apparatus | Mitsuhiro Okune | 2021-10-12 |
| 11101112 | Plasma processing device and plasma processing method | — | 2021-08-24 |
| 10964597 | Element chip manufacturing method | Atsushi Harikai, Noriyuki Matsubara, Hidefumi SAEKI, Akihiro Itou | 2021-03-30 |
| 10923362 | Manufacturing process of element chip | Atsushi Harikai, Noriyuki Matsubara, Hidehiko Karasaki | 2021-02-16 |
| 10923357 | Element chip and manufacturing process thereof | Akihiro Itou, Atsushi Harikai, Noriyuki Matsubara | 2021-02-16 |
| 10896849 | Method of dicing a semiconductor wafer using a protective film formed by coating a mixture of water-soluble resin and organic solvent | Hidehiko Karasaki, Noriyuki Matsubara, Hidefumi SAEKI | 2021-01-19 |
| 10892190 | Manufacturing process of element chip | Atsushi Harikai, Noriyuki Matsubara, Hidefumi SAEKI, Akihiro Itou | 2021-01-12 |