ST

Satoshi TODA

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #271,922 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11127597 Etching method Reiko SASAHARA, Takuya Abe, Tsuhung Huang, Yoshie OZAWA, Ken NAKAGOMI +2 more 2021-09-21