Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127597 | Etching method | Satoshi TODA, Takuya Abe, Tsuhung Huang, Yoshie OZAWA, Ken NAKAGOMI +2 more | 2021-09-21 |
| 10964546 | Substrate processing method and method for removing boron-doped silicon | Tsuhung Huang, Teppei Okumura | 2021-03-30 |