Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075169 | Integrated-circuitry overlay alignment mark, a substrate comprising an overlay alignment mark, a method of forming an overlay alignment mark in the fabrication of integrated circuitry, and a method of determining overlay alignment in the fabrication of integrated circuitry | Denzil S. Frost, Jianming Zhou | 2021-07-27 |
| 11009798 | Wafer alignment markers, systems, and related methods | Nikolay A. Mirin, Robert Dembi, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer | 2021-05-18 |