Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075169 | Integrated-circuitry overlay alignment mark, a substrate comprising an overlay alignment mark, a method of forming an overlay alignment mark in the fabrication of integrated circuitry, and a method of determining overlay alignment in the fabrication of integrated circuitry | Richard T. Housley, Jianming Zhou | 2021-07-27 |