RA

Richard Assion

EN Entegris: 1 patents #29 of 97Top 30%
Overall (2021): #290,288 of 548,734Top 55%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11107675 CVD Mo deposition by using MoOCl4 Thomas H. Baum, Philip S. H. Chen, Robert Wright, Jr., Bryan C. Hendrix, Shuang Meng 2021-08-31