PC

Philip S. H. Chen

EN Entegris: 1 patents #29 of 97Top 30%
Overall (2021): #302,228 of 548,734Top 60%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11107675 CVD Mo deposition by using MoOCl4 Thomas H. Baum, Robert Wright, Jr., Bryan C. Hendrix, Shuang Meng, Richard Assion 2021-08-31