Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164757 | Substrate cleaning device and substrate cleaning method | Haiyang Xu | 2021-11-02 |
| 10991615 | Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus | Haiyang Xu, Koji Maeda | 2021-04-27 |