Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193200 | PVD processing method and PVD processing apparatus | Hiroyuki Yokohara, Hiroshi Sone, Tetsuya Miyashita | 2021-12-07 |
| 11173523 | Substrate processing apparatus | Hidetatsu Isokawa, Xu Haiyang, Shun Ehara | 2021-11-16 |
| 10991615 | Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus | Haiyang Xu, Mitsuhiko Inaba | 2021-04-27 |
| 10903093 | Heating device | Kazuhiko Kubota, Atsushi Kinoshita, Keisuke Ishii | 2021-01-26 |