Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11173523 | Substrate processing apparatus | Koji Maeda, Xu Haiyang, Shun Ehara | 2021-11-16 |
| 10957546 | Substrate processing apparatus and method of controlling the same | — | 2021-03-23 |