Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192151 | Cleaning device, plating device including the same, and cleaning method | Shao Hua Chang | 2021-12-07 |
| 11008668 | Inspection method, inspection device, and plating apparatus including the same | — | 2021-05-18 |
| 10910334 | Device for inspecting a bump height surrounded by resist, device for processing a substrate, method for inspecting a bump height, and storage medium | Takahisa Okuzono, Jumpei Fujikata | 2021-02-02 |