| 11098414 |
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method |
Takashi Mitsuya, Ryuya Koizumi, Toshio Yokoyama, Kunio Oishi |
2021-08-24 |
| 11047063 |
Plating apparatus and plating method |
Jumpei Fujikata, Yoichi Nakagawa, Yoshitaka Mukaiyama, Yoshio Minami |
2021-06-29 |
| 11037791 |
Substrate holder, a method for holding a substrate with a substrate holder, and a plating apparatus |
Mizuki Nagai |
2021-06-15 |
| 10982348 |
Plating apparatus |
Mitsuhiro Shamoto |
2021-04-20 |
| 10968530 |
Electroplating device |
Mitsuhiro Shamoto, Tsutomu Nakada |
2021-04-06 |
| 10946351 |
Paddle, plating apparatus equipped with the paddle, and plating method |
Yasuyuki Masuda, Jumpei Fujikata, Yohei Wakuda, Shao Hua Chang |
2021-03-16 |
| 10914019 |
Plating apparatus and plating method |
Shao Hua Chang, Yasuyuki Masuda, Jumpei Fujikata, Tsutomu Nakada |
2021-02-09 |
| 10889911 |
Plating apparatus and plating method |
Takashi Kishi |
2021-01-12 |