Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11077525 | Method of processing a silicon carbide containing crystalline substrate, silicon carbide chip, and processing chamber | Michael Roesner, Gudrun Stranzl | 2021-08-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11077525 | Method of processing a silicon carbide containing crystalline substrate, silicon carbide chip, and processing chamber | Michael Roesner, Gudrun Stranzl | 2021-08-03 |