Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061316 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Mariko Uchida, Isao Kawasumi | 2021-07-13 |
| 11048160 | Mask blank, phase shift mask and method for manufacturing semiconductor device | Hiroaki Shishido | 2021-06-29 |