Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126089 | Method for determining corrections to features of a mask | Wei Fang, Zhichao Chen, Haili Zhang, Pengcheng Zhang | 2021-09-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126089 | Method for determining corrections to features of a mask | Wei Fang, Zhichao Chen, Haili Zhang, Pengcheng Zhang | 2021-09-21 |