Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175248 | Apparatus and method for detecting time-dependent defects in a fast-charging device | Long Ma, Chih-Yu JEN, Zhonghua Dong, Peilei Zhang, Chuan Li | 2021-11-16 |
| 11175590 | Low dose charged particle metrology system | Fei Wang, Kuo-Shih Liu | 2021-11-16 |
| 11126089 | Method for determining corrections to features of a mask | Lingling PU, Zhichao Chen, Haili Zhang, Pengcheng Zhang | 2021-09-21 |
| 11087954 | System and method for bare wafer inspection | Joe Wang | 2021-08-10 |
| 11043356 | Local alignment point calibration method in die inspection | Kevin Liu, Fei Wang, Jack Jau, Zhaohui Guo | 2021-06-22 |