Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11175590 | Low dose charged particle metrology system | Fei Wang, Wei Fang | 2021-11-16 | $63,040,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11175590 | Low dose charged particle metrology system | Fei Wang, Wei Fang | 2021-11-16 | $63,040,000 |