KL

Ky Thoai Luu

MI Mks Instruments: 3 patents #3 of 53Top 6%
Overall (2021): #73,797 of 548,734Top 15%
3
Patents 2021

Issued Patents 2021

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
11076477 Cooling and compression clamp for short lead power devices Aaron T. Radomski, Dave Coffta 2021-07-27
11011940 Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber Aaron T. Radomski 2021-05-18
10930470 Pulsed, bidirectional radio frequency source/load Aaron T. Radomski, Larry J. Fisk, II, Ross REINHARDT, Matthew G. Harrington, Amish Rughoonundon +2 more 2021-02-23