Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098414 | Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method | Takashi Mitsuya, Ryuya Koizumi, Toshio Yokoyama, Masashi Shimoyama | 2021-08-24 |
| 11099546 | Scheduler, substrate processing apparatus, and substrate conveyance method | Koji Nonobe, Takashi Mitsuya, Ryuya Koizumi | 2021-08-24 |