Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047063 | Plating apparatus and plating method | Masashi Shimoyama, Yoichi Nakagawa, Yoshitaka Mukaiyama, Yoshio Minami | 2021-06-29 |
| 10954603 | Substrate holder, plating apparatus, plating method, and electric contact | — | 2021-03-23 |
| 10946351 | Paddle, plating apparatus equipped with the paddle, and plating method | Yasuyuki Masuda, Masashi Shimoyama, Yohei Wakuda, Shao Hua Chang | 2021-03-16 |
| 10914019 | Plating apparatus and plating method | Shao Hua Chang, Yasuyuki Masuda, Masashi Shimoyama, Tsutomu Nakada | 2021-02-09 |
| 10914020 | Wave absorbing member attachable to paddle and plating apparatus including wave absorbing member | Shao Hua Chang | 2021-02-09 |
| 10910334 | Device for inspecting a bump height surrounded by resist, device for processing a substrate, method for inspecting a bump height, and storage medium | Takahisa Okuzono, Masaki Tomita | 2021-02-02 |