Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183372 | Batch type plasma substrate processing apparatus | Sung Ho Kang, Gyu Ho Choi, Hong Won Lee, Chang Dol KIM | 2021-11-23 |
| 11031214 | Batch type substrate processing apparatus | — | 2021-06-08 |
| 10961626 | Plasma processing apparatus having injection ports at both sides of the ground electrode for batch processing of substrates | Hong Won Lee, Sung Ho Kang, Chang Dol KIM, Gyu Ho Choi | 2021-03-30 |