Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183372 | Batch type plasma substrate processing apparatus | Sung Ho Kang, Jeong Hee JO, Gyu Ho Choi, Hong Won Lee | 2021-11-23 |
| 11111580 | Apparatus for processing substrate | Sung Ho Kang, Sang Don Lee | 2021-09-07 |
| 10961626 | Plasma processing apparatus having injection ports at both sides of the ground electrode for batch processing of substrates | Jeong Hee JO, Hong Won Lee, Sung Ho Kang, Gyu Ho Choi | 2021-03-30 |