Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189472 | Cathode assembly having a dual position magnetron and centrally fed coolant | Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Jiao Song, Prashant Prabhakar Prabhu | 2021-11-30 |
| D933726 | Deposition ring for a semiconductor processing chamber | Kirankumar Neelasandra SAVANDAIAH, Jiao Song, David Gunther, Anthony Chih-Tung Chan | 2021-10-19 |