Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209737 | Performance optimized scanning sequence for eBeam metrology and inspection | Henning Stoschus, Stefan Eyring, Ulrich Pohlmann, Nadav Gutman | 2021-12-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209737 | Performance optimized scanning sequence for eBeam metrology and inspection | Henning Stoschus, Stefan Eyring, Ulrich Pohlmann, Nadav Gutman | 2021-12-28 |