Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11019715 | Plasma source having a dielectric plasma chamber with improved plasma resistance | Xing Chen, Atul Gupta | 2021-05-25 |
| 10940635 | Method and apparatus for processing dielectric materials using microwave energy | Xing Chen, David Lam, Kevin W. Wenzel | 2021-03-09 |