Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193200 | PVD processing method and PVD processing apparatus | Koji Maeda, Hiroyuki Yokohara, Tetsuya Miyashita | 2021-12-07 |
| 11149342 | Sputtering apparatus | Junichi Takei | 2021-10-19 |