Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11117798 | MEMS-sensor | Alfons Dehe, Marc Fueldner, Bernd Goller, Ulrich Krumbein, Andreas Wiesbauer | 2021-09-14 |
| 11053117 | MEMS component and production method for a MEMS component | Marc Fueldner, Stefan Barzen, Alfons Dehe | 2021-07-06 |