Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11067907 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Masaki Nakano | 2021-07-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11067907 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Masaki Nakano | 2021-07-20 |