Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114225 | Rare earth thin film magnet and production method thereof | Hirotoshi Fukunaga, Takeshi Yanai, Hironobu Sawatari | 2021-09-07 |
| 11072842 | Rare earth thin film magnet and method for producing same | Hirotoshi Fukunaga, Takeshi Yanai, Hironobu Sawatari | 2021-07-27 |
| 11067907 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Fumio Iwamoto | 2021-07-20 |
| 10955760 | Extreme ultraviolet light generation device and target supply device | Yutaka Shiraishi | 2021-03-23 |
| 10883195 | Method of producing acrylic fiber bundle and method of producing carbon fiber bundle | Kengo Hayashida, Hirotada Endo | 2021-01-05 |