Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10928738 | Adaptive filter for in-line correction | Igor Matheus Petronella Aarts, Robert Anthony Augelli, Sergey MALYK | 2021-02-23 |
| 10895813 | Lithographic cluster, lithographic apparatus, and device manufacturing method | Irit Tzemah, John D. Connelly | 2021-01-19 |