Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976675 | Lithographic apparatus | Hans Butler, Paul Corné Henri DE WIT | 2021-04-13 |
| 10908508 | Position measurement of optical elements in a lithographic apparatus | Erik Loopstra, Sascha Bleidistel, Suzanne Cosijn | 2021-02-02 |