Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908508 | Position measurement of optical elements in a lithographic apparatus | Erik Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel | 2021-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908508 | Position measurement of optical elements in a lithographic apparatus | Erik Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel | 2021-02-02 |