Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908496 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2021-02-02 |